Detailed Product Description:

 

This is the formulation originally developed for Applied Materials for their wafer processing

 

systems.  It is commonly used in Neslab or SMC chillers to maintain the process temperatures

 

of plasma chambers.

 

 

HE-5 is a 50/50 Ethylene Glycol/DIW Blend, Semiconductor Grade, minimum 99.95% purity

 

Applied Materials Part Number:  5090-01013

 

DGR Part Number:  54725

 

 

Precautions:

 

Toxic by ingestion.  Toxic human dose reported to be 200cc.  TLV = 50ppm

 

 

Click here to download MSDS (Material Safety Data Sheet)

 

 

Packaging:

 

Comes packed in 1-gallon polyethylene jug with shrink-sealed cap & lot number tracking.