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HE-5 Heat Transfer Fluid, 4 x 1-gallon #300-102
HE-5 Heat Transfer Fluid, 4 x 1-gallon
Chemical Name:
HE-5 Heat Transfer Fluid


Detailed Product Description:


This is the formulation originally developed for Applied Materials for their wafer processing


systems. It is commonly used in Neslab or SMC chillers to maintain the process temperatures


of plasma chambers.





HE-5 is a 50/50 Ethylene Glycol/DIW Blend, Semiconductor Grade, minimum 99.95% purity


Applied Materials Part Number: 5090-01013


DGR Part Number: 54725







Toxic by ingestion. Toxic human dose reported to be 200cc. TLV = 50ppm





Click here to download MSDS (Material Safety Data Sheet)







Comes in a cardboard case packed with 4 ea. 1-gallon polyethylene jugs with


shrink-sealed caps, lot number tracking.








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