Detailed Product Description:

This is the formulation originally developed for Applied Materials for their wafer processing

systems. It is commonly used in Neslab or SMC chillers to maintain the process temperatures

of plasma chambers.

HE-5 is a 50/50 Ethylene Glycol/DIW Blend, Semiconductor Grade, minimum 99.95% purity

Applied Materials Part Number: 5090-01013

DGR Part Number: 54725

Precautions:

Toxic by ingestion. Toxic human dose reported to be 200cc. TLV = 50ppm

Click here to download MSDS (Material Safety Data Sheet)

Packaging:

Comes in a cardboard case packed with 4 ea. 1-gallon polyethylene jugs with

shrink-sealed caps, lot number tracking.