Detailed Product Description:
This is the formulation originally developed for Applied Materials for their wafer processing
systems. It is commonly used in Neslab or SMC chillers to maintain the process temperatures
of plasma chambers.
HE-5 is a 50/50 Ethylene Glycol/DIW Blend, Semiconductor Grade, minimum 99.95% purity
Applied Materials Part Number: 5090-01013
DGR Part Number: 54725
Toxic by ingestion. Toxic human dose reported to be 200cc. TLV = 50ppm
Click here to download MSDS (Material Safety Data Sheet)
Comes in a cardboard case packed with 4 ea. 1-gallon polyethylene jugs with
shrink-sealed caps, lot number tracking.